Plating method and plating apparatus
AssigneeEbara Corporation
InventorsRyuya Koizumi, Masashi Shimoyama, Mizuki Nagai
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Abstract
A plating method capable of saving a substrate in an event of a failure of a transporter, a plating tank, or other component when the substrate is being plated is disclosed. The plating method includes: transporting a plurality of substrates to a plurality of plating tanks, respectively, with a transporter; immersing the plurality of substrates in a plating solution held in the plurality of plating tanks to plate the plurality of substrates; detecting a failure that has occurred in the transporter or a post-processing tank; and replacing the plating solution in the plurality of plating tanks with a preservative liquid to thereby immerse the plurality of substrates in the preservative liquid.
Claims9
A plating method comprising:
- transporting a plurality of substrates to a plurality of plating tanks, respectively, with a transporter;
- immersing the plurality of substrates in a plating solution held in the plurality of plating tanks to plate the plurality of substrates;
- detecting a failure that has occurred in the transporter or a post-processing tank;
- discharging the plating solution from the plurality of plating tanks when the failure is detected;
- and
- filling the plurality of plating tanks with a preservative liquid to thereby immerse the plurality of substrates in the preservative liquid.
Dependencies are inferred from the claim text.