US 10,648,080 B2Granted

Full-area counter-flow heat exchange substrate support

AssigneeApplied Materials, Inc.

InventorJohn M. White

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Abstract

Embodiments described herein generally relate to a temperature control system in a substrate support assembly. In one embodiment, a substrate support assembly is disclosed. The substrate support assembly includes a support plate assembly The support plate assembly includes a first fluid supply manifold, a second fluid supply manifold, a first fluid return manifold, a second fluid return manifold, a plurality of first fluid passages, a plurality of second fluid passages, and a fluid supply conduit. The plurality of first fluid passages extend from the first fluid supply manifold to the first fluid return manifold. The plurality of second fluid passages extend from the second fluid supply manifold to the second fluid return manifold. The plurality of fluid passages extend across an upper surface of the support plate assembly in an alternating manner. The fluid supply conduit is configured to supply a fluid to the fluid supply manifolds.

Claims20

Dependent claims

A substrate support assembly, comprising:

a support plate assembly, comprising:
a first fluid supply manifold positioned at a first end of the support plate assembly;
a second fluid supply manifold positioned at a second end of the support plate assembly, the second end disposed opposite the first end;
a first fluid return manifold positioned at the second end of the support plate assembly;
a second fluid return manifold positioned at the first end of the support plate assembly;
a plurality of first fluid passages extending from the first fluid supply manifold to the first fluid return manifold, each first fluid passage configured to flow fluid in a first direction, wherein each of the first fluid passages have an inlet and an outlet and each of the first fluid passages is independent from each of the other first fluid passages;
a plurality of second fluid passages extending from the second fluid supply manifold to the second fluid return manifold, each second fluid passage configured to flow a fluid in a second direction that is opposite the first direction, wherein the first fluid passages and the second fluid passages extend across an upper surface of the support plate assembly in an approximately alternating manner, wherein the plurality of first fluid passages is independent to the plurality of second fluid passages, and wherein each of the second fluid passages have an inlet and an outlet and each of the second fluid passages is independent from each of the other second fluid passages;
and
a fluid supply conduit configured to supply a fluid to the first fluid supply manifold and the second fluid supply manifold.

6 more elements

A processing chamber, comprising:

a chamber body comprising a top wall, a sidewall and a bottom wall defining a processing region in the chamber body;
and
a substrate support assembly disposed in the processing region, the substrate support assembly comprising:
a support plate assembly, comprising:
a first fluid supply or return manifold positioned at a first end of the support plate assembly;
a second fluid supply or return manifold positioned at a second end of the support plate assembly, the second end disposed opposite the first end;
a first fluid return or supply manifold positioned at the second end of the support plate assembly;
a second fluid return or supply manifold positioned at the first end of the support plate assembly;
a plurality of first fluid passages extending from the first fluid supply manifold to the first fluid return manifold, each first fluid passage configured to flow fluid in a first direction, wherein each of the first fluid passages have an inlet and an outlet and each of the first fluid passages is independent from each of the other first fluid passages;
a plurality of second fluid passages extending from the second fluid supply manifold to the second fluid return manifold, each second fluid passage configured to flow a fluid in a second direction that is opposite the first direction, wherein the first fluid passages and the second fluid passages extend across an upper surface of the support plate assembly in a generally alternating manner, and wherein each of the second fluid passages have an inlet and an outlet and each of the second fluid passages is independent from each of the other second fluid passages;
and
a fluid supply conduit configured to supply a fluid to the first fluid supply or return manifold and the second fluid supply or return manifold.

9 more elements

A substrate support assembly, comprising:

a support plate assembly, comprising:
a first fluid supply manifold positioned at a first end of the support plate assembly;
a second fluid supply manifold positioned at a second end of the support plate assembly, the second end disposed opposite the first end;
a first fluid return manifold positioned at the second end of the support plate assembly;
a second fluid return manifold positioned at the first end of the support plate assembly;
a plurality of first fluid passages extending from the first fluid supply manifold to the first fluid return manifold, each first fluid passage configured to flow fluid in a first direction, wherein each of the first fluid passages have an inlet and an outlet and each of the first fluid passages is independent from each of the other first fluid passages;
a plurality of second fluid passages extending from the second fluid supply manifold to the second fluid return manifold, each second fluid passage configured to flow a fluid in a second direction that is opposite the first direction, wherein the first fluid passages and the second fluid passages extend across an upper surface of the support plate assembly in an approximately alternating manner, wherein the plurality of first fluid passages is independent to the plurality of second fluid passages, and wherein each of the second fluid passages have an inlet and an outlet and each of the second fluid passages is independent from each of the other second fluid passages;
a fluid supply conduit configured to supply a fluid to the first fluid supply manifold and the second fluid supply manifold;
and
a support plate having the passages formed therein.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/149,063Filed 6 May 2016
Published: US 2017/0321323 A19 Nov 2017
Granted: 12 May 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification13 codes

C23C 16/4586
The substrate being supported substantially horizontally: elements in the interior of the support, e.g. electrodes, heating or cooling devices
C23C 16/46
Characterised by the method of coating: characterised by the method used for heating the substrate
C23C 16/505
Using electric discharges: using radio frequency discharges
F28D 15/00
Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into