Method of preparing fiber sensing devices through low-temperature magnetic control sputtering

A method of preparing a fiber sensing device through low control sputtering comprising:

• placing a fiber grating base material in a sputtering cavity wherein the fiber grating base material is fixed on a fixture within a vacuum space of the sputtering cavity, the fixture is positioned on a support within the vacuum space, the fixture is formed having an upper part, a lower part, and a middle part formed between the upper part and the lower part, the upper part and the lower part are both thicker than the middle part, an upper sections of the fiber grating base material is fixed on the upper part of the fixture, a lower section of the fiber grating base material is fixed on the lower part of the fixture, and a spatial space is formed between a middle section of the fiber grating base material and the middle part of the fixture to leave the middle section exposed;
• pumping a first gas, a second gas, or both in the sputtering cavity and maintaining a set temperature, a set pressure and an applying voltage;
• and
• sputtering a metal compound target with a sputtering current to a surface of the fiber grating base material to form a film having a heat resistance at 100 to 650° C. thereon while the fixture is rotating in a direction, the support is rotating in a direction, and the rotation direction of the fixture is opposite to that of the support.