Vacuum processing system and method for mounting a processing system
AssigneeApplied Materials, Inc.
InventorsFlorian Ries, Stefan Hein, Jürgen Henrich, Andreas Sauer
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AssigneeApplied Materials, Inc.
InventorsFlorian Ries, Stefan Hein, Jürgen Henrich, Andreas Sauer
Estimating the term…
A vacuum processing system for a flexible substrate is provided. The processing system includes a first chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a second chamber adapted for housing one of a supply roll for providing the flexible substrate and a take-up roll for storing the flexible substrate; a maintenance zone between the first chamber and the second chamber; and a first process chamber for depositing material on the flexible substrate, wherein the second chamber is provided between the maintenance zone and the first process chamber. The maintenance zone allows for maintenance access to at least one of the first chamber and the second chamber.
A vacuum processing system for a flexible substrate, the vacuum processing system comprising:
A vacuum processing system for a flexible substrate, the vacuum processing system comprising:
Dependencies are inferred from the claim text.