Process kit having a floating shadow ring
AssigneeApplied Materials, Inc.
InventorsWilliam Johanson, Siew Kit Hoi, John Mazzocco, Kirankumar Savandaiah, Prashant Prabhu
Life of this patent
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Abstract
Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes an adapter having an adapter body and a shield portion radially inward of the adapter body; a heat transfer channel formed in the adapter body; a shadow ring coupled to the adapter such that the shield portion of the adapter extends over a portion of the shadow ring; and a ceramic insulator disposed between the shadow ring and the adapter to electrically isolate the shadow ring from the adapter.
Claims20
A process kit, comprising:
- an adapter having an adapter body and a shield portion radially inward of the adapter body;
- a heat transfer channel formed in the adapter body;
- a shadow ring coupled to the adapter between the adapter body and the shield portion such that the shield portion of the adapter extends over a portion of the shadow ring;
- and
- a ceramic insulator disposed between the shadow ring and the adapter to electrically isolate the shadow ring from the adapter.
A process chamber, comprising:
- a chamber wall defining an inner volume within the process chamber, wherein the chamber wall is grounded;
- a sputtering target disposed in an upper section of the inner volume;
- a substrate support having a support surface to support a substrate below the sputtering target;
- and
- a process kit, comprising:
- an adapter having an adapter body coupled to the chamber wall and a shield portion radially inward of the adapter body;
- a heat transfer channel formed in the adapter body;
- a shadow ring coupled to the adapter and surrounding the substrate support such that the shield portion of the adapter extends over a portion of the shadow ring;
- and
- a ceramic insulator disposed between the shadow ring and the adapter to electrically isolate the shadow ring from the adapter, wherein the adapter is disposed on an upper surface of the ceramic insulator.
A process kit, comprising:
- an electrically conductive adapter having an adapter body and a shield portion radially inward of the adapter body;
- a coolant channel formed in the adapter body;
- an electrically conductive shadow ring coupled to the adapter;
- a ceramic insulator disposed between the shadow ring and the adapter to electrically isolate the shadow ring from the adapter;
- and
- a deposition ring having an upper surface configured to interface with a lower surface of the shadow ring to form a tortuous path between the deposition ring and the shadow ring, wherein the shield portion extends over a portion of the shadow ring.
Dependencies are inferred from the claim text.