Method for implanting single or multiply charged ions into a surface of a treated object and device for implementation of the method

A device for implanting single or multiply charged ions into a surface of a treated object, the device comprising:

• an electronic cyclotron resonance (ECR) ion source and an electron gun,
• wherein the ECR ion source produces an ion beam and the electron gun produces a primary electron beam, and
• wherein the ECR ion source and the electron gun are arranged such that the primary electron beam intercepts the ion beam;
• and
• a target disposed on a path of the primary electron beam once the primary electron beam has passed through the ion beam,
• wherein the target is oriented such that a reflected secondary electron beam, produced by collision between electrons of the primary electron beam which have not recombined with ions of the ion beam and the target, impinges on the surface of the treated object and on a table on which the treated object is disposed.