High efficiency synthesis and purification recycling system of higher silane

A high-efficiency synthesis and purification recycling system of higher silane comprising:

• a reaction system for higher silane having a mono-silane drum, a mono-silane preheater, a reactor, a compressor, a hydrogen column and a mono-silane column, the mono-silane drum connected to the mono-silane preheater and the silane preheater connected to the reactor to heat mono-silane before entering into the reactor, the reactor connected to a silicon particle disposal system to pass and filter generated microsilica through the silicon particle disposal system, the silicon particle disposal system connected to the compressor, the hydrogen column and the mono-silane column, the hydrogen column removing non-condensed hydrogen, the mono-silane column connected to the bottom of the hydrogen column, mono-silane separated from the mono-silane column returned into the mono-silane preheater for recycling in the reaction system for higher silane;
• a purification system for disilane sequentially connected to a crude disilane drum, a first distillation column, a second distillation column, a third distillation column and a disilane drum, disilane and higher order silane compounds separated from a bottom of the mono-silane column stored in the crude disilane drum and then entering into the first distillation column, the second distillation column and the third distillation column for fractional purification, and purified high purity disilane stored in the disilane drum;
• a recycling system for disilane having at least one recycling drum connected to a plurality of import tubes and a recycling tube, the import tubes sequentially connected to the first distillation column, the second distillation column, the third distillation column and the disilane drum, low purity silane and disilane flowing into the recycling drum, helium gas added into the recycling drum sending recycled disilane liquid into the crude disilane drum through the recycling tube for further fractional purification;
• and
• a liquid nitrogen cooling system having a liquid nitrogen storage tank for storing and supplying nitrogen, the liquid nitrogen storage tank configured to distribute −196° C. liquid nitrogen via a first cooling tube to the hydrogen column and the silane column for a first cooling process;
• a second cooling tube configured to distribute −160° C. nitrogen after the first cooling process into the first distillation column, the second distillation column, the third distillation column and the recycling drum for a second cooling process, a third cooling tube configured to distribute −30° C. nitrogen after the second cooling process into the disilane drum for a third cooling process, a fourth cooling tube configured to distribute 25° C. nitrogen after the third cooling process into the silicon particle disposal system for a blowback regeneration process and to generate an anaerobic environment.