Methods of manufacture for MEMS switches with reduced switching voltage

A method of fabricating a switch comprising:

• forming a first cantilevered electrode over a first fixed electrode;
• forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode;
• forming a third cantilevered electrode operable to directly contact the first cantilever electrode upon an application of a voltage to a second fixed electrode;
• and
• forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode,
• wherein the forming the hermetically sealed volume comprises:
• forming at least one hole in a nitride liner to gain access to a sacrificial resist;
• removing the sacrificial resist;
• and
• closing the at least one hole by deposition of additional liner material, and
• wherein a material which forms the hermetically sealed volume comprises nitride.