Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor

A microphone, comprising:

• a micromechanical component including a mounting including a spanned diaphragm, the diaphragm being present in its initial shape when a pressure is the same on a first diaphragm side of the diaphragm and a second diaphragm side of the diaphragm, and is warpable out of its initial shape against a diaphragm counter force according to a diaphragm spring constant of the diaphragm with the aid of a pressure difference between the first diaphragm side and the second diaphragm side, and at least one actuator electrode which is connected to the diaphragm, and, via at least one spring, is connected to the mounting in such a way that the at least one actuator electrode is adjustable out of its respective starting position against a spring force according to at least one spring constant of the at least one spring with the aid of a warping of the diaphragm;
• wherein an overall system spring constant is a sum of the diaphragm spring constant of the diaphragm and a total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to mounting;
• wherein the total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to the mounting, is at least 5% of the overall system spring constant.

A pressure sensor, comprising:

• a micromechanical component including a mounting including a spanned diaphragm, the diaphragm being present in its initial shape when a pressure is the same on a first diaphragm side of the diaphragm and a second diaphragm side of the diaphragm, and is warpable out of its initial shape against a diaphragm counter force according to a diaphragm spring constant of the diaphragm with the aid of a pressure difference between the first diaphragm side and the second diaphragm side, and at least one actuator electrode which is connected to the diaphragm, and, via at least one spring, is connected to the mounting in such a way that the at least one actuator electrode is adjustable out of its respective starting position against a spring force according to at least one spring constant of the at least one spring with the aid of a warping of the diaphragm;
• wherein an overall system spring constant is a sum of the diaphragm spring constant of the diaphragm and a total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to mounting;
• wherein the total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to the mounting, is at least 5% of the overall system spring constant.

A manufacturing method for a micromechanical component, the method comprising:

• connecting at least one actuator electrode via at least one spring to a mounting including a spanned diaphragm, the diaphragm being present in its initial shape when a pressure is the same on a first diaphragm side of the diaphragm and a second diaphragm side of the diaphragm, and is warped out of its initial shape against a diaphragm counter force according to a diaphragm spring constant of the diaphragm with the aid of a pressure difference between the first diaphragm side and the second diaphragm side, the at least one actuator electrode being connected to the diaphragm in such a way that the at least one actuator electrode is adjusted out of its respective starting position against a spring force according to at least one spring constant of the at least one spring with the aid of a warping of the diaphragm;
• wherein an overall system spring constant being a sum of the diaphragm spring constant of diaphragm and a total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to the mounting, and
• wherein the total spring constant of all of the at least one springs via which the at least one actuator electrode is connected to the mounting is established at at least 5% of the overall system spring constant.