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AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsXiaofeng Yuan, Qiang Wu
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A method for assembling a microlens array assembly including a set of microlens array elements having at least two array elements having a first array element and a second array element includes adsorbing the first array element using a mobile platform, adsorbing the second array element using a fixture platform, coarsely aligning the second array element with the first array element based on edges of the second array element and edges of the first array element, finely aligning the second array element with the first array element based on an array pattern of the second array element and an array pattern of the first array element, and attaching the second array element to the first array element. The method enables assembling of multiple microlens array elements.
A method for assembling a microlens array assembly comprising at least two array elements including a first array element and a second array element, the method comprising:
A method for assembling a microlens array assembly comprising at least two array elements including a first array element and a second array element, the method comprising:
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