Cleaning apparatus
AssigneeShigenkaihatsukenkyujyo, Inc.
InventorsTsunejiro Takahashi, Hideki Yamaguchi, Shogoro Kudaka
Life of this patent
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Abstract
The problem to be addressed by the present invention is to provide a cleaning apparatus capable of obtaining a cleaning liquid having a high degree of cleanliness. A cleaning apparatus 10 includes a dissolution tank 20 for dissolving a gas in a liquid, a transfer pump 30 for sending the liquid together with the gas into the dissolution tank 20, and a feed nozzle 40 for feeding the liquid stored in the dissolution tank 20 to a workpiece W. The transfer pump 30 is a positive displacement pump. Portions of the dissolution tank 20, the transfer pump 30, and the feed nozzle 40 that come into contact with the liquid are made of a fluororesin.
Claims10
A cleaning apparatus comprising:
- a dissolution tank for dissolving a gas in a liquid;
- a transfer pump for sending the liquid together with the gas into the dissolution tank;
- and
- a feed nozzle for feeding the liquid from the dissolution tank to a workpiece,
- wherein
- the transfer pump is a positive displacement pump,
- portions of the dissolution tank, the transfer pump, and the feed nozzle that come into contact with the liquid are made of a fluororesin,
- the feed nozzle is a microbubble generating nozzle,
- an injection pipe is provided inside the dissolution tank,
- an injection hole for injecting the liquid sent by the positive displacement pump toward an inner wall of the dissolution tank is provided in an outer periphery of the injection pipe, and
- the injection hole is positioned below a liquid level of the dissolution tank.
Dependencies are inferred from the claim text.