Dense arrays and charge storage devices

An array of nonvolatile memory cells, comprising a monolithic three dimensional memory array that comprises N device levels that are vertically stacked and separated from each other, wherein N is an integer greater than 1;

• wherein each device level of the N device levels includes a respective two-dimensional array of memory cells, and N two-dimensional arrays of memory cells are vertically stacked within the array;
• and
• wherein each memory cell comprises a semiconductor device and each memory cell size per bit is about (2f2)/N, where f is a minimum feature size.