Manufacturing method for 3D multipath inductor

A method for fabricating a three-dimensional multipath inductor, comprising:

• forming a first metal layer including:
• a plurality of spiral turns about a center region, each of the plurality of spiral turns including a plurality of segments that extend length-wise along the spiral turns, at least two segments of the plurality segments included in each of the plurality of spiral turns include a position that varies from an innermost position relative to the center region and an outermost position relative to the center region,
• wherein the plurality of segments included in each of the plurality of spiral turns are laterally divided and spaced from an adjacent plurality of segments included in a distinct spiral turn of the plurality of spiral turns;
• forming a lateral cross-over between at least two segments of the plurality of segments included in each of the plurality of spiral turns of the first metal layer, each of the lateral cross-overs is formed laterally adjacent and laterally aligned with one another,
• wherein each of the lateral cross-overs is configured to adjust a position of each segment of the plurality of segments within the first metal layer relative to the center region by forming lateral segment paths between each segment of the plurality of segments in each of the plurality of spiral turns for the first metal layer, each of the lateral segment paths including substantially the same length for each segment of the plurality of segments in each of the plurality of spiral turns
• forming a second metal layer including a corresponding geometry similar to the first metal layer, the second metal layer including:
• a plurality of spiral turns about the center region, each of the plurality of spiral turns including a plurality of segments that extend length-wise along the plurality of spiral turns of the second metal layer;
• and
• forming a vertical cross-over in at least one segment of the plurality of segments included in each of the plurality of spiral turns of the first metal layer, each of the vertical cross-overs formed laterally adjacent and laterally aligned with one another,
• wherein each of the vertical cross-overs is configured to couple a single segment of the plurality of segments in each of the plurality of spiral turn of the first metal layer to a corresponding single segment of the plurality of segments in each of the plurality of spiral turn of the second metal layer by forming vertical segment paths between each segment of the plurality of segments in each of the plurality of spiral turns for the first metal layer and the second metal layer, each of the vertical segment paths include substantially the same length for all vertical segment paths formed between the plurality of segments in each of the plurality of spiral turns for the first metal layer and the plurality of segments in each of the plurality of spiral turns for the second metal layer.