Active opening MEMS switch device
AssigneeAnalog Devices Global
InventorsPadraig Fitzgerald, Michael James Twohig
Life of this patent
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Abstract
Microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The beam, the hinges and the anchor may be made of the same material in some configurations. The switch can include electrodes, disposed on a surface of the substrate, for electrically controlling the orientation of the beam. The hinges may be thinner than the beam, resulting in the hinges being more flexible than the beam. In some configurations, the hinges are located within an opening in the beam. The hinges may extend in the same direction of the axis of rotation of the beam and/or in a direction perpendicular to the axis of rotation of the beam.
Claims20
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- a post on the substrate;
- first, second, third and fourth electrodes disposed on the substrate, the first and second electrodes being positioned on a first side of the post, the third and fourth electrodes being positioned on a second side of the post that is opposite the first side;
- a fifth electrode disposed on the substrate and in electrical communication with the post;
- a microscale beam enclosing an opening in a center portion thereof, the post being disposed within the enclosed opening;
- and
- a hinge disposed within the enclosed opening and mechanically coupling the beam to the post,
- wherein the hinge has a first thickness and the beam comprises a conductive beam of a second thickness greater than the first thickness.
A method of fabricating a microelectromechanical systems (MEMS) switch, comprising:
- fabricating a post on a substrate;
- fabricating a hinge coupled to the post;
- fabricating first, second, third and fourth electrodes on the substrate, such that the first and second electrodes are positioned on a first side of the post and the third and fourth electrodes are positioned on a second side of the post that is opposite the first side;
- fabricating a fifth electrode on the substrate and in electrical communication with the post;
- and
- fabricating a beam enclosing an opening in a center portion thereof,
- each of the post and the hinge being disposed within the enclosed opening, and the beam being coupled to the post via the hinge,
- wherein fabricating the hinge and fabricating the beam comprises fabricating the hinge to have a first thickness and the beam to have a second thickness greater than the first thickness.
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- a post on the substrate;
- first, second, third and fourth electrodes disposed on the substrate, the first and second electrodes being positioned on a first side of the post, the third and fourth electrodes being positioned on a second side of the post that is opposite the first side;
- a fifth electrode disposed on the substrate and in electrical communication with the post;
- a microscale beam enclosing an opening in a center portion thereof, the post being disposed within the enclosed opening;
- and
- means for coupling the beam to the post,
- wherein the means has a first thickness and the beam comprises a conductive beam of a second thickness greater than the first thickness.
Dependencies are inferred from the claim text.