Solar cell manufacturing method

A method for manufacturing a solar cell comprising the steps of:

• (a) producing a silicon substrate having a first main surface and a second main surface,
• (b) misting a solution containing a metal element,
• (c) spraying said misted solution onto the first main surface of said silicon substrate under non-vacuum to form a passivation film made of a metal oxide film on the first main surface of said silicon substrate,
• (d) producing a solar cell structure using said silicon substrate having said passivation film formed thereon, and
• (e) performing a light irradiation processing in which an interface between said passivation film and said first main surface of said silicon substrate is irradiated with a given light during fabrication of the solar cell, wherein
• said step (d) includes (d-1) a step of forming a first electrode and a second electrode on a first main surface side and a second main surface side of said silicon substrate, respectively,
• said step (d-1) includes a baking processing for baking at a given baking temperature,
• said step (e) is performed after said step (d), and
• said given light in said step (e) is one of:
• light whose photon energy is 1.1 eV or more,
• artificial solar light having an air mass of 1.5, and
• ultraviolet light having a wavelength of 365 nm.