System and method for learning and/or optimizing manufacturing processes
AssigneeTokyo Electron Limited
InventorsSanjeev Kaushal, Sukesh Janubhai Patel
Life of this patent
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Abstract
A system and method for learning and/or optimizing processes related to semiconductor manufacturing is provided. A learning component generates a set of candidate process models based on process data associated with one or more fabrication tools. The learning component also selects a particular process model from the set of candidate process models that is associated with lowest error. An optimization component generates a set of candidate solutions associated with the particular process model. The optimization component also selects a particular solution from the set of candidate solutions based on a target output value and an output value associated with the particular solution.
Claims20
A system, comprising:
- a memory storing computer executable components;
- and
- a processor configured to execute the following computer executable components stored in the memory:
- a learning component that generates a set of candidate process models based on process data associated with one or more fabrication tools and selects a particular process model from the set of candidate process models based on a first defined criterion;
- and
- an optimization component that generates a set of candidate solutions associated with the particular process model and selects a particular solution from the set of candidate solutions based on a second defined criterion.
A method, comprising:
- employing a processor that facilitates execution of computer executable instructions stored on a non-transitory computer readable medium to implement operations, comprising:
- generating a set of candidate process models based on process data associated with one or more manufacturing tools;
- selecting a particular process model from the set of candidate process models based on a first defined criterion;
- generating a set of candidate solutions associated with the particular process model;
- and
- selecting a particular solution from the set of candidate solutions based on a second defined criterion.
A non-transitory computer-readable medium having stored thereon computer-executable instructions that, in response to execution by a system including a processor, cause the system to perform operations, the operations including:
- generating a set of candidate process models based on process data associated with a fabrication tool;
- selecting a process model from the set of candidate process models based on a defined criterion;
- generating a set of candidate solutions associated with the process model;
- and
- selecting a solution from the set of candidate solutions based on a target output value.
Dependencies are inferred from the claim text.