Substrate pre-baking device

A substrate pre-baking device, comprising:

• a baking box housing having a baking chamber in an interior space of the baking box housing, wherein an opening corresponding to a side door is arranged on a lateral side of the baking box housing;
• the side door arranged at the opening of the baking box housing;
• a heating structure arranged in the baking chamber;
• and
• a hot air curtain device arranged at the side door of the baking box housing;
• wherein when the side door is opened, the hot air curtain device is configured to form a hot air curtain for isolating the baking chamber from an external environment at the opening of the side door;
• wherein the hot air curtain device comprises:
• a plurality of air outlets arranged on an upper side of the opening corresponding to the side door;
• a plurality of channels in communication with the air outlets;
• a plurality of heating tubes arranged in the channels and connected with a controller;
• and
• at least one fan arranged in the channels and connected with the controller;
• wherein the air outlets comprise:
• a first row of exhaust outlets arranged on a side of the opening of the side door, that is adjacent to the baking chamber, and configured to form a first hot air curtain;
• and
• a second row of exhaust outlets arranged on a side of the opening of the side door, that is adjacent to the external environment, and configured to form a second hot air curtain;
• wherein the first row of exhaust outlets and the second row of exhaust outlets are arranged side by side;
• and
• wherein temperature of the second hot air curtain can be close to that of external environment, and is less than temperature of the first hot air curtain, and temperature of the first hot air curtain is approximately the same as temperature in the baking chamber.