Semiconductor device, operation method of semiconductor device, and manufacturing method of semiconductor device

An operation method of a semiconductor device including:

• a plurality of transistors;
• a plurality of inverters;
• a ring oscillator configured such that the plurality of inverters is connected in a ring-like form, and gate capacitors of the transistors are connected to respective output terminals of the plurality of inverters as a load capacitor;
• and
• a terminal that outputs an oscillating signal of the ring oscillator,
• wherein the ring oscillator is configured with a plurality of transistors having a same gate length, and at least two or more ring oscillators including a plurality of transistors having different gate lengths are configured, and
• the operation method comprises:
• outputting, by the ring oscillator, an oscillating signal from the terminal.

A manufacturing method of a semiconductor device including:

• a plurality of transistors;
• a plurality of inverters;
• a ring oscillator configured such that the plurality of inverters is connected in a ring-like form, and gate capacitors of the transistors are connected to respective output terminals of the plurality of inverters as a load capacitor;
• and
• a terminal that outputs an oscillating signal of the ring oscillator,
• wherein the ring oscillator is configured with a plurality of transistors having a same gate length, and at least two or more ring oscillators including a plurality of transistors having different gate lengths are configured, and
• the manufacturing method comprises:
• forming a plurality of transistors and the plurality of inverters in a first process;
• and
• forming wiring connecting the plurality of transistors with the plurality of inverters in a second process.