Electron microscope for magnetic field measurement and magnetic field measurement method

A magnetic field measurement method by an electron microscope, wherein

• the electron microscope
• comprises a control analysis apparatus that accelerates an electron beam emitted from an electron source, that adjusts an electron beam irradiation region in which a specimen is irradiated with the electron beam, that causes at least one or more magnifying lenses to adjust a projection magnification for the electron beam transmitted through the specimen to project the electron beam onto an electron detector and to analyze a detected signal, and that analyzes an electromagnetic field of the specimen;
• a magnetic field application coil that applies a magnetic field to the specimen;
• a coil that controls astigmatism of the electron beam with which the specimen is irradiated;
• an irradiation system deflection coil that controls an inclination and a position of the electron beam with which the specimen is irradiated;
• a coil that controls the astigmatism of the electron beam at a time of arrival of the electron beam transmitted through the specimen at the electron detector;
• and an imaging system deflection coil that controls an inclination and a position of the electron beam at the time of arrival of the electron beam transmitted through the specimen at the electron detector, and wherein
• the control analysis apparatus
• measures electromagnetic field information by repeating a plurality of times measurement of electromagnetic field information after a first magnetic field is applied to the specimen and measurement of electromagnetic field information after a second magnetic field is applied to the specimen a plurality of times, and calculates magnetic field information changed by magnetic field application from the measured electromagnetic field information.