Multilevel fabricators
OwnerFrederick A. Flitschinventor
Life of this patent
Estimating the term…
Abstract
The present invention provides various aspects for supporting multilevel fabricators. In some examples, the multilevel fabricators may include a cleanspace region for moving work material. In some examples, panels of filters may be positioned to support the cleanspace. In some embodiments existing processing equipment and automation are placed into the new environment. In other embodiments the processing equipment is placed and new automation equipment is used. Automated tool placement equipment may be used to place the equipment. In some examples, automated tool handling equipment may be used to remove and replace processing equipment into the multilevel fabricator.
Claims5
A method for forming a cleanspace fabricator;
- said method comprising:
- constructing a building comprising a cleanspace fabricator structure wherein at least two flooring levels are configured within the building and wherein each flooring level comprises at least a primary cleanspace, wherein an air source provides air flow through the primary cleanspace in a direction from a first vertical wall to a second vertical wall and through at least a portion of the first vertical wall and through at least a portion of the second vertical wall;
- placing a first processing tool into said cleanspace fabricator structure, wherein the first processing tool is one of a multitude of processing tools wherein each of the processing tools are placed into a position of vertically stacked processing tools within the each flooring level;
- and configuring an automation system on the each flooring level to move production units from one processing tool to another, wherein for the each flooring level the automation system is configured on a ceiling of the primary cleanspace and interfaces with each of the vertically stacked processing tools of the each flooring level.
Dependencies are inferred from the claim text.