Epitaxial structure and method for making the same
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsYang Wei, Shou-Shan Fan
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Abstract
An epitaxial structure and a method for making the same are provided. The epitaxial structure includes a substrate, an epitaxial layer and a carbon nanotube layer. The epitaxial layer is located on the substrate. The carbon nanotube layer is located in the epitaxial layer. The method includes following. A substrate having an epitaxial growth surface is provided. A carbon nanotube layer is suspended above the epitaxial growth surface. An epitaxial layer is epitaxially grown from the epitaxial growth surface to enclose the carbon nanotube layer therein. The epitaxial layer is a substantially homogenous material from the substrate.
Claims18
A method for making an epitaxial structure comprising:
- providing a substrate having an epitaxial growth surface;
- suspending a carbon nanotube layer above and spaced apart from the epitaxial growth surface, wherein the carbon nanotube layer defines a plurality of apertures between adjacent carbon nanotubes;
- and
- epitaxially growing an epitaxial layer on the epitaxial growth surface, wherein the epitaxial layer is a substantially homogenous material and grows from the epitaxial growth surface;
- the epitaxial layer grows through the plurality of apertures to enclose the carbon nanotube layer so that a patterned space is formed in the epitaxial layer, and an inner wall of the patterned space is spaced apart from the carbon nanotube layer.
Dependencies are inferred from the claim text.