Flash memory with multiple control gates and flash memory array device made thereof
AssigneeNational Cheng Kung University
InventorsDarsen Duane Lu, Yi-Chi Wang, Huai Kuan Zeng
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AssigneeNational Cheng Kung University
InventorsDarsen Duane Lu, Yi-Chi Wang, Huai Kuan Zeng
Estimating the term…
The present disclosure relates to a flash memory having a plurality of control gates, including: a substrate. An oxide layer disposed on the substrate. A fin-shaped channel layer disposed on the oxide layer, and includes a first end portion, a second end portion, a top surface and two side surfaces, wherein the top surface and the two side surfaces are located between the first end portion and the second end portion, the top surface faces away from the oxide layer and separates the two sides. The two charge storage structures are respectively disposed on the two sides of the fin channel layer. The two gates are disposed on the oxide layer and respectively contact with the two charge storage structures. Two word conductive pillars are connected to the two gates respectively and extending from the two gates in a direction leaving the oxide layer.
A flash memory having a plurality of control gates, comprising:
Dependencies are inferred from the claim text.