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US 10,613,033 B2Granted
Porous silicon sensor
AssigneeRockley Photonics Limited
InventorsYi Zhang, Aaron John Zilkie, Haydn Frederick Jones, Adam Scofield
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Abstract
A chemical sensor, including a porous optical waveguide. The loss or index of refraction, or both, of the porous waveguide is affected by the presence of one or more chemicals of interest.
Claims8
A method for fabricating a waveguide having a porous portion, the method comprising:
- fabricating a starting wafer, the starting wafer comprising a substrate and a top surface composed at least in part of porous silicon, and
- etching the top surface of the starting wafer to form the waveguide,
- wherein the fabricating of the starting wafer comprises:
- fabricating a first wafer, the first wafer comprising:
- a silicon substrate, and
- a layer of silicon dioxide on the silicon substrate;
- fabricating a second wafer, the second wafer comprising:
- a silicon substrate,
- a high-porosity porous silicon layer on the silicon substrate, and
- a low-porosity porous silicon layer on the high-porosity porous silicon layer, the low-porosity porous silicon layer having lower porosity than the high-porosity porous silicon layer;
- bonding together the first wafer and the second wafer to form a bonded assembly;
- and
- cleaving the bonded assembly at the low-porosity porous silicon layer to form a bonded wafer, the bonded wafer having a top surface of porous silicon.
10 more elements
Dependencies are inferred from the claim text.