Equipment and process for preparing silicon oxides

Abstract

The present invention discloses an equipment and process for preparing silicon oxides, and relates to the field of chemical equipments. Said equipment comprises at least one tank having opening(s) at at least one end thereof and comprising a reaction unit and a collection unit, wherein the reaction unit is used for placing raw materials therein; and the collection unit is used for placing a collector therein which is placed at the opening end of the tank; and the reaction unit is placed away from the opening end of the tank and placed inside a heating furnace; the collection unit and opening(s) are both placed outside the heating furnace; the tank is vacuumized via a port; and a tank lid is used for opening or closing the opening(s) of the tank. The preparation process uses such equipment. The present invention solves the problems of great energy consumption and low efficiency caused by the fact that the previous equipment and process for preparing silicon oxides are unable to achieve continuous production.

Dependencies are inferred from the claim text.