Hydrogen gas recovery system and hydrogen gas separation and recovery method

A hydrogen gas recovery system for separating and recovering a hydrogen gas from a reaction exhaust gas exhausted from an apparatus for producing polycrystalline silicon using trichlorosilane as a raw material, the system comprising:

• A:
• a condensation and separation apparatus configured to condense and separate chlorosilanes from a hydrogen-containing reaction exhaust gas exhausted from a polycrystalline silicon production;
• B:
• a compression apparatus configured to compress the hydrogen-containing reaction exhaust gas that has passed through the condensation and separation apparatus;
• C:
• an absorption apparatus configured to absorb and separate hydrogen chloride by contacting the hydrogen-containing reaction exhaust gas that has passed through the compression apparatus with an absorption liquid;
• D:
• a first adsorption apparatus comprising at least one first adsorption column filled with activated carbon that adsorbs and removes methane, hydrogen chloride, and part of the chlorosilanes from the hydrogen-containing reaction exhaust gas that has passed through the absorption apparatus;
• E:
• a second adsorption apparatus comprising at least one second adsorption column filled with synthetic zeolite that adsorbs and removes methane contained in the hydrogen-containing reaction exhaust gas that has passed through the first adsorption apparatus, the synthetic zeolite being a ferrierite having a molecular ratio of silica (SiO2) to alumina (Al2O3) (SiO2/Al2O3) of from 15 to 20 and comprising at least one positive ion selected from the group consisting of potassium, magnesium, and barium;
• and
• F:
• a first gas line configured to recover a purified hydrogen gas having a reduced concentration of methane, the purified hydrogen gas having been exhausted from the second adsorption apparatus,
• wherein the purified hydrogen gas has a concentration of methane of 1 ppm or less.