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US 10,605,987 B2Granted
Re-based integrated photonic and electronic layered structures
AssigneeIQE plc
InventorsAndrew Clark, Rich Hammond, Rytis Dargis, Michael Lebby, Rodney Pelzel
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Abstract
Systems and methods describe growing RE-based integrated photonic and electronic layered structures on a single substrate. The layered structure comprises a substrate, an epi-twist rare earth oxide layer over a first region of the substrate, and a rare earth pnictide layer over a second region of the substrate, wherein the first region and the second region are non-overlapping.
Claims21
A layered structure, comprising:
- a substrate;
- an epi-twist rare earth oxide layer over a first region of the substrate;
- and
- a rare earth pnictide layer over a second region of the substrate, wherein the first region and the second region are non-overlapping.
1 more element
A layered structure, comprising:
- a substrate;
- an epi-twist rare earth oxide layer over the substrate;
- a stack of a first epitaxial metal, a layer forming a modulated optical path, and a second epitaxial metal over the layer, wherein the stack is over a first region on the epi-twist rare earth oxide layer;
- and
- a waveguide over a second region on the epi-twist rare earth oxide layer.
2 more elements
Dependencies are inferred from the claim text.