Ferroelectric memory cell for an integrated circuit
AssigneeNaMLab gGmbH
InventorUwe Schröder
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Abstract
An integrated circuit comprises a ferroelectric memory cell including an oxide storage layer, an electrode layer, and an interface layer. The oxide storage layer comprises a ferroelectric material that is at least partially in a ferroelectric state. The ferroelectric material comprises, as main components, oxygen and any of the group consisting of Hf, Zr and (Hf,Zr). The interface layer is disposed between the oxide storage layer and the electrode layer and includes at least one element with a higher valence value than Hf or Zr.
Claims21
An integrated circuit comprising a ferroelectric memory cell, the ferroelectric memory cell comprising:
- an oxide storage layer comprising a ferroelectric material that is at least partially in a ferroelectric state, the ferroelectric material comprising one or more components selected from the group consisting of (Hf, O), (Zr, O), and (Hf, Zr, O), wherein the one or more components are present in an amount higher per unit cell than any other components or additives present in the oxide storage layer;
- an electrode layer;
- and
- an oxygen vacancy density reduction layer disposed between the oxide storage layer and the electrode layer, wherein the oxygen vacancy density reduction layer comprises at least one element with a higher valence value than Hf(4+) or Zr(4+).
Dependencies are inferred from the claim text.