Ion source crucible for solid feed materials
AssigneeApplied Materials, Inc.
InventorsKlaus Becker, Daniel Alvarado, Michael St. Peter, Graham Wright
Life of this patent
Estimating the term…
Abstract
An ion source with a crucible is disclosed. In some embodiments, the crucible is disposed in one of the ends of the ions source, opposite the cathode. In other embodiments, the crucible is disposed in one of the side walls. A feed material, which may be in solid form is disposed in the crucible. In certain embodiments, the feed material is sputtered by ions and electrons in the plasma. In other embodiments, the feed material is heated so that it vaporizes. The ion source may be oriented so that the crucible is disposed in the lowest wall so that gravity retains the feed material in the crucible.
Claims21
An indirectly heated cathode ion source, comprising:
- an arc chamber, comprising a plurality of electrically conductive side walls connecting a first end and a second end;
- an indirectly heated cathode disposed on the first end of the arc chamber;
- and
- a crucible disposed on the second end of the arc chamber, wherein the crucible comprises a target holder having a recessed cavity into which a feed material is disposed.
An indirectly heated cathode ion source, comprising:
- an arc chamber, comprising a plurality of electrically conductive side walls connecting a first end and a second end;
- an indirectly heated cathode disposed on the first end of the arc chamber;
- and
- a crucible disposed on a second side wall, opposite a first side wall, wherein the crucible comprises a target holder having a recessed cavity into which a feed material is disposed.
An ion source, comprising:
- an arc chamber, having a plurality of walls in which a plasma is generated;
- and
- a crucible disposed on one of the plurality of walls, to hold a feed material;
- wherein the arc chamber is oriented so that gravity retains the feed material in the crucible, wherein the crucible comprises a target holder having a recessed cavity into which the feed material is disposed and wherein a top surface of the crucible is flush with the one of the plurality of walls.
Dependencies are inferred from the claim text.