Transfer apparatus
AssigneeToshiba Kikai Kabushiki Kaisha
InventorsMitsunori Kokubo, Takato Baba, Toshiaki Goto
Life of this patent
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Abstract
According to one embodiment, a transfer apparatus includes a transfer roller which supports a mold and transfers a fine transfer pattern formed on the mold to a resin coated on a substrate installed in a substrate installation part with movement of the transfer roller and a transfer roller guide part for guiding the transfer roller when the mold is pressed against the resin coated on the substrate installed in the substrate installation part by the movement of the transfer roller.
Claims2
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate installed in a substrate installation part, comprising:
- a transfer roller configured to support the mold and carry out transferring with movement of the transfer roller;
- and
- a transfer roller guide part configured to guide the transfer roller when the mold is pressed against the resin coated on the substrate installed in the substrate installation part by the movement of the transfer roller, wherein:
- the transfer roller guide part is an inclined member inclined integrally with the substrate installation part;
- the inclined member includes a transfer roller engaging portion formed along a moving direction of the transfer roller and protruded to the moving direction;
- the transfer roller engaging portion includes a proximal side portion located on the side of the substrate installation part and a distal side portion distant from the substrate installation part;
- and
- the proximal side portion is formed so as to extend in the moving direction of the transfer roller, while the distal side portion is formed so as to extend obliquely to the moving direction of the transfer roller at a predetermined angle.
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate installed in a substrate installation part, comprising:
- a transfer roller configured to support the mold and carry out transferring with movement of the transfer roller;
- and
- a transfer roller guide part configured to guide the transfer roller when the mold is pressed against the resin coated on the substrate installed in the substrate installation part by the movement of the transfer roller, wherein:
- the transfer roller guide part is an inclined member inclined integrally with the substrate installation part;
- and
- the inclined member is formed along a moving direction of the transfer roller and also formed so as to extend from the substrate installation part in the moving direction of the transfer roller and protrude obliquely to the moving direction at a predetermined angle.
Dependencies are inferred from the claim text.