Bulk acoustic wave filter
AssigneeRFHIC Corporation
InventorWon Sang Lee
Life of this patent
Estimating the term…
Abstract
A bulk acoustic wave (BAW) filter for passing through electric signals in a preset frequency range is provided. The BAW filter includes: a diamond substrate; a passivation layer formed on the diamond substrate; a first metal layer formed on the passivation layer; a piezoelectric layer formed on the first metal layer; a second metal layer formed on a piezoelectric layer and a metal pad formed on the first metal layer. The metal pad, first metal layer, piezoelectric layer and second metal layer form an electrical path that allows an electrical signal within a preset frequency range to pass therethrough.
Claims12
A bulk acoustic wave filter, comprising:
- a diamond substrate;
- a passivation layer formed on the diamond substrate;
- a first metal layer formed on the passivation layer;
- a piezoelectric layer formed on the first metal layer;
- a second metal layer formed on the piezoelectric layer;
- a metal pad formed on the first metal layer;
- wherein the metal pad, first metal layer, piezoelectric layer and second metal layer form an electrical path that allows an electrical signal within a frequency range to pass therethrough;
- and
- a seed layer disposed between the diamond substrate and the passivation layer, formed of diamond powder and used to grow the diamond substrate thereon.
A bulk acoustic wave comprising:
- a diamond substrate that does not have any through hole therein;
- a passivation layer formed directly on the diamond substrate;
- a first metal layer formed directly on the passivation layer;
- a piezoelectric layer formed on the first metal layer;
- a second metal layer formed on the piezoelectric layer;
- a metal pad formed on the first metal layer;
- wherein the metal pad, first metal layer, piezoelectric layer and second metal layer form an electrical path that allows an electrical signal within a frequency range to pass therethrough;
- and
- a seed layer disposed between the diamond substrate and the passivation layer, formed of diamond powder and used to grow the diamond substrate thereon.
Dependencies are inferred from the claim text.