Piezoelectric device and manufacturing method therefor
AssigneeMurata Manufacturing Co., Ltd.
InventorTakashi Iwamoto
Life of this patent
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Abstract
A piezoelectric device includes a first piezoelectric substrate, a second piezoelectric substrate and an adhesive layer. First conductor patterns are provided on a front surface of the first piezoelectric substrate. A first piezoelectric element is defined by the first conductor patterns. Second conductor patterns are provided on a front surface of the second piezoelectric substrate. A second piezoelectric element is provided of these patterns. The adhesive layer adheres a rear surface of the first piezoelectric substrate and a rear surface of the second piezoelectric substrate to each other. The adhesive layer adheres the first and second substrates to each other such that a compressive stress is applied to the first and second piezoelectric substrates in a bonded state.
Claims20
A piezoelectric device comprising:
- a first functional substrate that is made of a crystalline material having piezoelectric properties and that includes a first functional conductor pattern on a front surface thereof;
- the first functional conductor pattern includes:
- comb IDT electrodes and electrical patterns which provide electrical lead outs for the comb IDT electrode;
- a second functional substrate that includes a second functional conductor pattern on a front surface thereof and an adhesive layer that affixes a rear surface of the first functional substrate and a rear surface of the second functional substrate to each other and that applies a compressive stress to the first functional substrate in an affixed state.
A piezoelectric device comprising:
- a first functional substrate that is made of a crystalline material having piezoelectric properties and that includes a first functional conductor pattern on a front surface thereof;
- the first functional conductor pattern includes:
- comb IDT electrodes and electrical patterns which provide electrical lead outs for the comb IDT electrode;
- a second functional substrate that includes a second functional conductor pattern on a front surface thereof and an adhesive layer that affixes a rear surface of the first functional substrate and a rear surface of the second functional substrate to each other wherein a crystal lattice spacing at the rear surface of the first functional substrate and the rear surface of the second functional substrate is smaller than a crystal lattice spacing at the front surface of the first functional substrate and the front surface of the second functional substrate.
A piezoelectric device manufacturing method comprising:
- forming a first functional conductor pattern on a front surface of a first functional substrate that is made of a material having piezoelectric properties:
- the first functional conductor pattern includes:
- comb IDT electrodes and electrical patterns which provide electrical lead outs for the comb IDT electrode;
- forming a second functional conductor pattern on a front surface of a second functional substrate and applying a compressive stress to the first functional substrate by bonding a rear surface of the first functional substrate and a rear surface of the second functional substrate to each other.
Dependencies are inferred from the claim text.