Single-step synthesis of nanostructured thin films by a chemical vapor and aerosol deposition process
AssigneeWashington University
InventorsTandeep Singh Chadha, Pratim Biswas, Woo-Jin An
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Abstract
The present disclosure is generally directed to a single-step synthesis of nanostructured thin films by a chemical vapor and aerosol deposition (CVAD) process. The present disclosure is also directed to methods for controlling the morphology of the nanostructured thin films. The films can be used, for example, in lithium ion and/or sodium ion battery electrodes, solar cells and gas sensors.
Claims20
A chemical vapor and aerosol deposition process for preparation of a metal species-based nanostructured film comprising niobium doped titanium dioxide nanoparticles, the process comprising:
- introducing at least one vaporized metal precursor into a reaction chamber, wherein the reaction chamber includes a temperature controlled metal substrate;
- decomposing, at least in part, the at least one vaporized precursor to form metal species-based nanoparticles in the reaction chamber;
- depositing the nanoparticles and any remaining vaporized precursor onto the temperature controlled metal substrate in the reaction chamber;
- and,
- sintering the nanoparticles to form the metal species-based nanostructured film in the reaction chamber, wherein the nanostructured film has a morphology selected from the group consisting of a predominantly columnar morphology, a predominantly granular morphology, a predominantly nanorod morphology, a predominantly nanowire morphology, and a predominantly branched morphology.
An anode for an ion battery comprising a metal species-based nanostructured film directly deposited onto a metal substrate, the film comprising nanoparticles and having a single crystal dendritic nanostructure morphology.
A chemical vapor and aerosol deposition process for production of an ion battery anode, the process comprising:
- introducing at least one vaporized metal precursor into a reaction chamber, wherein the reaction chamber includes a temperature controlled metal substrate current collector;
- decomposing, at least in part, the at least one vaporized precursor to form metal species-based nanoparticles in the reaction chamber;
- directly depositing the nanoparticles and any remaining vaporized precursor onto the temperature controlled metal substrate current collector in the reaction chamber;
- and,
- sintering the nanoparticles to form the metal species-based nanostructured anode in the reaction chamber, wherein the nanostructured anode has a morphology selected from the group consisting of a predominantly columnar morphology, a predominantly granular morphology, a predominantly nanorod morphology, a predominantly nanowire morphology, and a predominantly branched morphology.
Dependencies are inferred from the claim text.