Piezoelectric material, piezoelectric element, and electronic apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMakoto Kubota, Hisato Yabuta, Shunsuke Murakami, Kaoru Miura, Kanako Oshima
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Abstract
The present invention provides a lead-free piezoelectric material having a high piezoelectric constant over a wide operating temperature region. Therefore, the present invention relates to a piezoelectric material including a perovskite-type metal oxide represented by general formula (1) below as a main component, wherein the average valence, of Sn contained in the general formula (1) lies between 2 and 4. (BavCawSnxTiyZrz)O3 (where 0.620≤v≤0.970,0.010≤w≤0.200,0.030≤x≤0.230,0.865≤y≤0.990,0≤z≤0.085, and 1.986≤v+w+x+y+z≤2.100) General Formula (1)
Claims30
A piezoelectric material comprising a perovskite-type metal oxide represented by general formula (1), wherein the average valence of Sn contained in the general formula (1) is between 2.2 and 3.7:
- (BavCawSnxTiyZrz)O3, where 0.620≤v≤0.970,0.010≤w≤0.200,0.030≤x≤0.230,0.865≤y≤0.990,0≤z≤0.085, and 1.986≤v+w+x+y+z≤2.100. General Formula (1)
Dependencies are inferred from the claim text.