Piezoelectric device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakao Mouri, Kansho Yamamoto
Life of this patent
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Abstract
A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater.
Claims17
A piezoelectric device comprising:
- a substrate defining an opening therein;
- a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate;
- a first electrode that is arranged between the piezoelectric layer and the substrate in at least the membrane part;
- a second electrode that is arranged above the piezoelectric layer so as to face at least part of the first electrode with the piezoelectric layer interposed therebetween in the membrane part;
- and
- a heater arranged above the piezoelectric layer and separate from the upper electrode, wherein the heater extends over the opening of the substrate and overlaps the piezoelectric layer.
A piezoelectric device comprising:
- substrate defining an opening therein;
- a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate;
- a first electrode that is arranged between the piezoelectric layer and the substrate in at least the membrane part;
- and
- a second electrode that is arranged above the piezoelectric layer so as to face at least part of the first electrode with the piezoelectric layer interposed therebetween in the membrane part, at least part of the second electrode being configured as a heater, and wherein the heater extends over the opening of the substrate and overlaps the piezoelectric layer.
Dependencies are inferred from the claim text.