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US 10,593,699 B2Granted
Ferroelectric memory device
AssigneeSK hynix Inc.
InventorHyangkeun Yoo
Life of this patent
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Abstract
A ferroelectric memory device includes a substrate, a ferroelectric structure having a first ferroelectric material layer, an electrical floating layer, and a second ferroelectric material layer sequentially stacked on the substrate, and a gate electrode layer disposed on the ferroelectric structure. A hysteresis loop of the second ferroelectric material layer differs from a hysteresis loop of the first ferroelectric material layer.
Claims7
A ferroelectric memory device comprising:
- a substrate;
- a ferroelectric structure disposed on the substrate, wherein the ferroelectric structure comprises
- a first ferroelectric material layer disposed on the substrate,
- an electrical floating layer disposed on the first ferroelectric material layer, and
- a second ferroelectric material layer disposed on the electrical floating layer;
- and
- a gate electrode layer disposed on the ferroelectric structure,
- wherein a hysteresis loop of the second ferroelectric material layer differs from a hysteresis loop of the first ferroelectric material layer, and
- wherein the first ferroelectric material layer, the electrical floating layer, the second ferroelectric material layer, and the gate electrode layer are sequentially stacked;
- wherein the first and second ferroelectric material layers each comprise the same metal oxide and each comprise one or more dopants, and
- wherein the one or more dopants of the first ferroelectric material layer differ from the one or more dopants of the second ferroelectric material layer;
- wherein the metal oxide comprises at least one of a hafnium oxide, a zirconium oxide, and a hafnium zirconium oxide;
- and
- wherein the electrical floating layer is disposed between the first ferroelectric material layer and the second ferroelectric material layer, and wherein only the first ferroelectric material layer contacts the substrate.
11 more elements
Dependencies are inferred from the claim text.