Semiconductor module comprising an encapsulating compound that covers at least one semiconductor component
AssigneeHeraeus Deutschland GmbH & Co. KG
InventorsRonald Eisele, Anton-Zoran Miric, Frank Krüger, Wolfgang Schmitt
Life of this patent
Estimating the term…
Abstract
A semiconductor module (10) contains a ceramic interconnect device (50) having at least one semiconductor component (20). The at least one semiconductor component (20) is covered by an encapsulating compound (30) which contains a cured inorganic cement and has a thermal expansion coefficient in the range of 2 to 10 ppm/K. The ceramic of the ceramic interconnect device (50) is selected from ceramics based on aluminum oxide, aluminum nitride or silicon nitride.
Claims11
A method for producing a semiconductor module comprising a ceramic interconnect device having at least one semiconductor component, wherein the at least one semiconductor component is covered by an encapsulating compound comprising a cured inorganic cement and having a thermal expansion coefficient in the range of 2 to 10 ppm/K, the method comprising:
- providing the ceramic interconnect device having the at least one semiconductor component,
- forming the cured inorganic cement by mixing a powdered mixture of an inorganic binding agent and inorganic additives with water to form a pourable mass, pouring the pourable mass, and setting and drying the poured mass for 30 to 120 minutes in a temperature range of 20° C. to 120° C., wherein the powdered mixture of the inorganic binding agent and the inorganic additives is a magnesium phosphate cement, and
- covering the at least one semiconductor component with the encapsulating compound comprising the cured inorganic cement and having the thermal expansion coefficient in the range of 2 to 10 ppm/K,
- wherein the ceramic of the ceramic interconnect device is selected from the group consisting of ceramics based on aluminum oxide, aluminum nitride, and silicon nitride.
Dependencies are inferred from the claim text.