Electronic circuit comprising electrically insulating trenches
AssigneesAledia, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFabienne Goutaudier, Thomas Lacave, Vincent Beix, Stephan Borel, Bertrand Chambion, Brigitte Soulier
Life of this patent
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Abstract
An electronic circuit including a semiconducting or conducting substrate having first and second opposite surfaces and at least first and second non-parallel electrically insulating trenches that extend from the first surface in the substrate, define at least one portion of the substrate and join at a junction, the portion of the substrate including a protrusion that extends to the junction.
Claims8
An electronic circuit comprising a semiconductor or conductive substrate having first and second opposite faces and at least first and second electric insulation trenches, not parallel, comprising walls, extending in the substrate from the first face, delimiting at least a portion of the substrate and joining at a junction, the portion of the substrate comprising a protrusion penetrating into the junction, wherein the first trench comprises, on the side of said portion, a first planar wall and wherein the second trench comprises, on the side of said portion, a second planar wall, the first planar wall being coupled to the second planar wall by a connection surface successively comprising, from the first wall to the second wall, a first curved surface delimiting a portion of convex volume of the first trench, a second curved surface delimiting a portion of concave volume of the junction, and a third curved surface delimiting a portion of convex volume of the second trench, and wherein the first, second, and third surfaces-correspond, in a plane parallel to the first face, respectively to first, second, and third arcs of a circle.
Dependencies are inferred from the claim text.