Electrostatic chuck device including a heating member
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsTomomi Ito, Yukio Miura
Life of this patent
Estimating the term…
Abstract
An electrostatic chuck device includes: an electrostatic chuck section having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having gaps; a sheet material; and a base section having a function of cooling the electrostatic chuck section, in this order, in which each of the gaps of the pattern is filled with an inorganic filler composition which includes an inorganic filler and an adhesive.
Claims7
An electrostatic chuck device comprising:
- an electrostatic chuck section having one principal surface serving as a placing surface adapted to receive a plate-shaped sample, and having a built-in electrostatic attracting internal electrode;
- a heating member bonded to a surface on an opposite side of the placing surface of the electrostatic chuck section in a pattern having gaps;
- at a lower section of the heating member, a sheet material;
- and
- at a lower section of the sheet material, a base section having a function of cooling the electrostatic chuck section,
- wherein each of the gaps of the pattern is filled with an inorganic filler composition which includes an inorganic filler and an adhesive;
- wherein a filling rate of the inorganic filler composition with respect to a total volume of the gap of the pattern is in a range of 50% by volume to 100% by volume, a layer thickness of the inorganic filler composition being no greater than a thickness of the heating member;
- and
- wherein the inorganic filler composition is bonded to the electrostatic chuck section.
Dependencies are inferred from the claim text.