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US 10,593,582 B2Granted
Transfer head and method for transferring micro devices
AssigneeMikro Mesa Technology Co., Ltd.
InventorLi-Yi Chen
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Abstract
A method for transferring a plurality of micro devices e is provided. The method includes picking up the micro devices from a carrier substrate by a transfer head, and iteratively performing a placing process. The placing process includes moving the transfer head to a position, at which an array of the micro devices is positioned over an array of receiving locations of a receiving substrate, and placing said array of the micro devices onto the array of the receiving locations of the receiving substrate.
Claims9
A method for transferring a plurality of micro devices, comprising:
- picking up the micro devices from a carrier substrate by a transfer head;
- and
- iteratively performing a placing process, wherein the placing process comprises:
- moving the transfer head to a position, at which an array of the micro devices is positioned over an array of receiving locations of a receiving substrate, wherein the array comprises at least two columns;
- and
- placing said array of the micro devices onto the array of receiving locations of the receiving substrate;
- wherein two of the arrays of the micro devices to be respectively placed by sequent two iterations of the placing process are at least partially embedded to each other on the carrier substrate before the picking up, and said two of the arrays of the micro devices are completely separated from each other on the receiving substrate after said sequent two iterations of the placing process.
4 more elements
Dependencies are inferred from the claim text.