EFEM, equipment front end module

An equipment front end module (EFEM), the EFEM comprising:

• a wafer transfer chamber in which wafer transfer is performed between a wafer storage device and process equipment, wherein the wafer transfer chamber includes a front wall, a rear wall, a left wall, a right wall, and corner walls, so as to form an inner surface of the wafer transfer chamber;
• a delivery unit positioned on an upper portion of the wafer transfer chamber for delivering gases into the wafer transfer chamber;
• and
• an exhaust unit positioned on a lower portion of the wafer transfer chamber for exhausting the gases in the wafer transfer chamber,
• wherein the inner surface of the wafer transfer chamber has curved surface portions,
• wherein each of the corner walls is provided at a corresponding one of a position between the front and left walls, a position between the front and right walls, a position between the rear and left walls, and a position between the rear and right walls, and
• wherein one of the curved surface portions that are provided on the corner walls is formed convexly outward from a corner of the wafer transfer chamber.