Substrate container with window retention spring
AssigneeEntegris, Inc.
InventorsRuss V. Raschke, Jason T. Steffens
Life of this patent
Estimating the term…
Abstract
A reticle container for containing a reticle including a base plate having one or more windows. Each of the windows can include mounting recess having a recess sidewall including an undercut defined therein. A transparent substrate can be disposed in the mounting recess and is retained therein by a retention member having an arcuate portion extending between a first end portion and a second end portion. At least the first end portion of the retention member can be positioned in the undercut defined in the recess sidewall such that the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess.
Claims15
A substrate container comprising:
- a reticle container having a base plate and a cover, the cover adapted to engage the base plate defining an enclosure, the base plate including at least one window having:
- a mounting recess including a first recess sidewall, a bottom sidewall, and an undercut defined second recess sidewall, wherein together the first recess sidewall and the bottom sidewall define a lip,
- a transparent substrate disposed in the mounting recess and supported on the lip, and
- a retention member having an arcuate portion extending between a first end portion and a second end portion, wherein the first end portion is positioned in the undercut defined in the recess sidewall and the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess and wherein the retention member is constructed from a material having a modulus of elasticity (E) of about 15 psi×103 to about 30 psi×103.
Dependencies are inferred from the claim text.