Inspection system
AssigneeBrooks Automation (Germany) GmbH
InventorLutz Rebstock
Life of this patent
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Abstract
The invention relates to an inspection system adapted for determining a state and/or content of a wafer or reticle container or at least a part of a wafer or reticle container, comprising a detection device or a multitude of detection devices (102, 104, 152, 154, 156, 158, 160, 164) adapted to receive detection data from a surface and/or interior of the wafer or reticle container or the part of a wafer or reticle container indicative of the state and/or content of the wafer or reticle container or the part of a wafer or reticle container.
Claims26
Inspection system configured to determine a state of wear of a container, for a wafer or reticle, or at least a part of the container, comprising:
- a detection device or a multitude of detection devices configured to receive container surface detection data, separate and distinct from each wafer or reticle carried by the container, from a surface and/or interior of the container or the part of the container separate and distinct from each wafer or reticle carried by the container, wherein the received container surface detection data, separate and distinct from each wafer or reticle carried by the container, is indicative of wear of the container or the part of the container, separate and distinct from each respective wafer or reticle carried by the container, which received container surface detection data, separate and distinct from each wafer or reticle carried by the container, embodies the state of wear of the container or the part of the container, separate and distinct from each respective wafer or reticle carried by the container;
- and
- a data processor configured to identify the state of wear based on the received container surface detection data separate and distinct from each respective wafer or reticle carried by the container.
A workpiece container inspection system, the workpiece container being configured to hold and carry workpieces within the workpiece container, the workpiece container inspection system comprising:
- a detection device that forms a container inspection field disposed to inspect a container feature separate and distinct from a workpiece held within the workpiece container, where the detection device is configured to detect the container feature, separate and distinct from the workpiece held within the workpiece container, in the container inspection field and generate detection data, separate and distinct from the workpiece held within the workpiece container, that embodies a container feature wear characteristic of the detected container feature;
- and
- a data processor configured to identify a state of wear of the container feature based on the container feature wear characteristic embodied in the detection data, separate and distinct from the workpiece held within the workpiece container.
Dependencies are inferred from the claim text.