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US 10,593,570 B2Granted
Substrate holding module, substrate processing apparatus, and substrate processing method
AssigneeEbara Corporation
InventorsAkihiro Yazawa, Kenichi Kobayashi, Kenichi Akazawa
Life of this patent
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Abstract
According to the present disclosure, there is provided a substrate holding module that is capable of accommodating a substrate transferred by a transfer robot. The substrate holding module includes a pedestal including a holding mechanism configured to hold the substrate, a cover configured to cover the pedestal, and a moving mechanism configured to move the cover away from the pedestal.
Claims14
A substrate processing apparatus comprising:
- a substrate holding module comprising a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface, a pedestal disposed above the bottom surface and including a holder configured to hold a substrate, a cover configured to cover the pedestal, a moving mechanism configured to move the cover relative to the bottom surface, and a control unit that controls various operations of the substrate holding module, wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position,
- stop movement of the cover, and move the cover to a second position after stopping the movement of the cover, and wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position;
- and
- a plurality of robots transfers the substrate to the substrate holding module.
1 more element
A substrate holding module comprising:
- a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface;
- a pedestal disposed above the bottom surface and including a holder configured to hold a substrate;
- a cover configured to cover the pedestal;
- a moving mechanism configured to move the cover relative to the bottom surface;
- and
- a control unit that controls various operations of the substrate holding module,
- wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position at a first speed, stop movement of the cover, and move the cover to a second position at a second speed slower than the first speed after stopping the movement of the cover, and
- wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position.
5 more elements
A substrate holding module comprising:
- a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface;
- a pedestal disposed above the bottom surface and including a holder configured to hold a substrate;
- a cover configured to cover the pedestal;
- a moving mechanism configured to move the cover relative to the bottom surface;
- and
- control unit that controls various operations of the substrate holding module,
- wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position, stop movement of the cover, and move the cover to a second position after stopping the movement of the cover, and
- wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position.
5 more elements
Dependencies are inferred from the claim text.