Coating method
AssigneeSCREEN Holdings Co., Ltd.
InventorsShogo Yoshida, Hiroyuki Ogura, Ryuichi Yoshida
Life of this patent
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Abstract
A coating method of coating a substrate with a chemical includes a solvent supplying step and a chemical supplying step. In the solvent supplying step, a solvent is supplied to the substrate. After the solvent supplying step, the chemical is supplied to the substrate in the chemical supplying step. The solvent supplying step includes a first step. The first step causes the substrate to rotate at a first rotation speed, causes a solvent nozzle to move between a central position above a center portion of the substrate and a peripheral position above a peripheral portion of the substrate, and causes the solvent nozzle to dispense the solvent.
Claims17
A coating method of coating a substrate with a chemical, the coating method comprising:
- a solvent supplying step of supplying a solvent to the substrate;
- and a chemical supplying step of supplying the chemical to the substrate after the solvent supplying step, wherein the solvent supplying step includes a first step of rotating the substrate at a first rotation speed, moving a solvent nozzle between a central position above a center portion of the substrate and a peripheral position above a peripheral portion of the substrate, and dispensing the solvent from the solvent nozzle:
- and the solvent is an organic solvent, wherein the first rotation speed is more than 0 rpm and less than 500 rpm, the solvent nozzle includes an outlet through which the solvent is dispensed, and comprising:
- obtaining a reference value by dividing a radius of the substrate by a dimension of the outlet;
- and in the first step, while moving the solvent nozzle between the central position and the peripheral position, rotating the substrate by a number of rotations that is equal to or more than the reference value.
Dependencies are inferred from the claim text.