Support assembly

A component for mounting to a chamber lid of a plasma processing chamber, comprising:

• a first electrode adapted to be coupled to an RF power source, the first electrode comprising:
• an upper section having a lower disk surface, an upper disk surface and an outer disk diameter;
• and
• an expanding section extending from the lower disk surface to a lower body surface, the expanding section having:
• a cylindrical peripheral outer wall having a diameter extending from the lower disk surface to the lower body surface, wherein the diameter is less than the outer disk diameter;
• and
• a conical inner diameter wall defining a cavity and expanding outwards from an opening formed in the cavity to the lower body surface, wherein the conical inner diameter wall has a slope in the range of 1:1 to 20:1;
• and
• a gas inlet that extends from the outer disk diameter to the opening formed in the cavity;
• and
• a second electrode coupled to a ground, a top surface of a distribution plate, and a top surface of a blocker plate, wherein the first electrode is coupled to and electrically isolated from the second electrode by an insulator disposed therebetween;
• wherein the distribution plate is in electrical communication with the second electrode;
• wherein the blocker plate comprises apertures formed therein;
• and
• wherein the blocker plate is disposed between the second electrode and the distribution plate.

A component for mounting to a chamber lid of a processing chamber, comprising:

• a first electrode adapted to be coupled to an RF power source, the first electrode comprising:
• an upper section having an outer disk diameter and a lower disk surface;
• an expanding section extending from the lower disk surface to a lower body surface, the expanding section having:
• a cylindrical peripheral outer wall having a diameter extending from the lower disk surface to the lower body surface, wherein the diameter is less than the outer disk diameter;
• and
• a conical inner diameter wall defining a cavity and expanding away from an opening formed in the cavity to the lower body surface;
• and wherein
• a gas inlet extending from the outer disk diameter to the opening formed in the cavity;
• and
• a second electrode coupled to a top surface of a distribution plate, a top surface of a blocker plate, and a ground, wherein the first electrode is coupled to and electrically isolated from the second electrode by an insulator disposed therebetween;
• wherein the distribution plate is in electrical communication with the second electrode;
• wherein the blocker plate comprises apertures formed therein;
• and
• wherein the blocker plate is disposed between the second electrode and the distribution plate.