Membrane assembly, examination container and electron microscope

An examination container, which is placed in an examination chamber of an electron microscope for examination of a sample inside the examination container, comprising:

• a main body having an accommodating trough for holding the sample;
• a membrane assembly covering an opening end of the accommodating trough and including:
• a support body having a first surface and a second surface opposite to the first surface, wherein the support body is a flat structure and made of metallic material, metallic compound material or polymer material, and a first through-hole penetrates through the first surface and the second surface;
• and
• a membrane disposed on the second surface of the support body and having a second through-hole, wherein the second through-hole corresponds to the first through-hole and allows a charged particle beam to pass;
• and
• a cover detachably connected to the main body to secure the membrane assembly by directly pressing the support body of the membrane assembly.

An electron microscope comprising:

• an examination chamber defining a vacuum environment;
• a charged particle beam generator interconnecting with the examination chamber and generating a charged particle beam inside the examination chamber;
• an examination container placed inside the examination chamber, bombarded by the charged particle beam, and including:
• a main body having an accommodating trough for holding a sample;
• a membrane assembly covering an opening end of the accommodating trough and including:
• a support body having a first surface and a second surface opposite to the first surface, wherein the support body is a flat structure and made of metallic material, metallic compound material or polymer material, and a first through-hole penetrates through the first surface and the second surface;
• and
• a membrane disposed on the second surface of the support body and having a second through-hole, wherein the second through-hole corresponds to the first through-hole and allows the charged particle beam to pass and bombard the sample;
• and
• a cover detachably connected to the main body to secure the membrane assembly by directly pressing the support body of the membrane assembly;
• and
• a detector detecting a response to bombarding of the charged particle beam on the sample and converting the response into an electronic signal.