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AssigneeHitachi High-Technologies Corporation
InventorsYoshifumi Sekiguchi, Shin Imamura, Hajime Kawano, Shahedul Hoque
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The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.
A light guide for guiding light generated from a scintillator to a photoreceiving element, comprising:
A charged particle beam device comprising a light guide having a light incident surface, an emission surface for emitting light incident from the incident surface, and a surface for guiding light incident from the incidence surface to the emission surface, wherein
Dependencies are inferred from the claim text.