Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsBenjamin John Cook, Dieter Winkler
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Abstract
A multi-beam charged particle beam device is described. The multi-beam charged particle beam device includes a charged particle source configured to emit a primary charged particle beam; an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam; and a blanking device, the blanking device includes at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet; and a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector.
Claims22
A multi-beam charged particle beam device, comprising:
- a charged particle source configured to emit a primary charged particle beam;
- an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam;
- and
- a blanking device, the blanking device comprises:
- at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet;
- and
- a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector, the first blanking deflector provided in a bore of the first shielding element.
A multi-beam charged particle beam device, comprising:
- a charged particle source configured to emit a primary charged particle beam;
- an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam;
- and
- a blanking device, the blanking device comprising:
- at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet;
- and
- a shield assembly having a first shielding element partially or fully surrounding the first blanking deflector wherein the first blanking deflector includes an electrode having an arc of 100° or more.
A multi-beam charged particle beam device, comprising:
- a charged particle source configured to emit a primary charged particle beam;
- an aperture arrangement having openings configured to generate at least a first beamlet and a second beamlet of the primary charged particle beam;
- and
- a blanking device, the blanking device comprising:
- at least a first blanking deflector for the first beamlet and a second blanking deflector for the second beamlet;
- and
- a shield assembly, including:
- a first shielding element partially or fully surrounding the first blanking deflector, a further first shielding element for the second beamlet and partially or fully surrounding the second blanking deflector, a further second shielding element for the second beamlet upstream of the further first blanking deflector, and a further third shielding element for the second beamlet downstream of the further first blanking deflector.
A method for operating a charged particle beam device, comprising:
- generating a primary charged particle beam;
- generating a first beamlet from the primary charged particle beam and a second beamlet from the primary charged particle beam;
- scanning the first beamlet and the second beamlet over a specimen;
- blanking the first beamlet with a first deflection field of a first blanking deflector for the first beamlet;
- and
- shielding the first deflection field of the first blanking deflector to reduce crosstalk to the second beamlet, the first blanking deflector provided in a bore of a first shielding element.
Dependencies are inferred from the claim text.