Image processing apparatus, surface analyzer, and image processing method
AssigneeJEOL Ltd.
InventorsNaoki Katoh, Norihisa Mori
Life of this patent
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Abstract
An image processing apparatus including a processor and a memory, the processor executing a program stored in the memory to: acquire elemental map data representing a distribution of X-ray intensity or a distribution of concentration for each element; generate a phase map indicating a distribution of phases of compounds based on the elemental map data; and generate graphs representing X-ray intensity of each element or a concentration of each element as an area for the respective phases of the compounds included in the phase map and cause a display section to display the graphs.
Claims7
A surface analyzer image processing apparatus, comprising a processor and a memory, the processor configured to execute a program stored in the memory to:
- acquire, from a surface analyzer main body analyzing a surface of a sample, elemental map data representing a distribution of X-ray intensity or a distribution of concentration for each element on the surface of the sample;
- generate a phase map of the surface of the sample indicating a distribution of phases of compounds based on the elemental map data and cause a display section to display the phase map;
- and
- generate graphs representing X-ray intensity of each element or a concentration of each element as an area for the respective phases of the compounds included in the phase map and cause the display section to display the graphs.
A surface analyzer, comprising:
- a surface analyzer main body configured to:
- apply an electron beam to a sample;
- detect characteristic X-rays generated from the sample;
- and
- analyze a surface of the sample to generate elemental map data representing a distribution of X-ray intensity or a distribution of concentration for each element on the surface of the sample;
- and
- an image processing apparatus comprising a processor and a memory, the processor configured to execute a program stored in the memory to:
- acquire, from the surface analyzer main body, the elemental map data;
- generate a phase map of the surface of the sample indicating a distribution of phases of compounds based on the elemental map data and cause a display section to display the phase map;
- and
- generate graphs representing X-ray intensity of each element or a concentration of each element as an area for the respective phases of the compounds included in the phase map and cause the display section to display the graphs.
A surface analyzer image processing method, comprising:
- acquiring, with a surface analyzer image processing apparatus and from a surface analyzer main body analyzing a surface of a sample, elemental map data representing a distribution of X-ray intensity or a distribution of concentration for each element on the surface of the sample;
- generating, with the surface analyzer image processing apparatus, a phase map of the surface of the sample indicating a distribution of phases of compounds based on the elemental map data and causing a display section to display the phase map;
- and
- generating, with the surface analyzer image processing apparatus, graphs representing X-ray intensity of each element or a concentration of each element as an area for the respective phases of the compounds included in the phase map and causing the display section to display the graphs.
Dependencies are inferred from the claim text.