Substrate processing apparatus, processing apparatus, and method for manufacturing device

A pattern exposure apparatus that exposes a mask pattern to a substrate, the pattern exposure apparatus comprising:

• a rotary drum that supports a flexible substrate, which is exposed with a mask pattern formed on an outer circumferential surface of a cylindrical mask that rotates about a first center axis, with a cylindrical outer circumferential surface which has a predetermined radius from a second center axis arranged parallel with the first center axis, and that rotates about the second center axis,
• a rotary drum-side scale portion that is arranged for measuring a movement of the substrate which is fed in a circumferential direction by a rotation of the rotary drum, that includes a scale circularly arranged at a position having a predetermined radius from the second center axis, and that rotates together with the rotary drum,
• a first projection optical system that projects an exposure light, which is a part of a light that comes through the mask pattern of the cylindrical mask, to the substrate at a first projection area which is inclined at an angle of −θ in the circumferential direction of the rotary drum from a center plane which includes each of the first center axis and the second center axis,
• a second projection optical system that projects an exposure light, which is a part of a light that comes through the mask pattern of the cylindrical mask, to the substrate at a second projection area which is inclined at an angle of +θ in the circumferential direction of the rotary drum from the center plane,
• a first reading device that is arranged to oppose with the rotary drum-side scale portion while being inclined at the angle of −θ from the center plane about the second center axis and that reads the scale, and
• a second reading device that is arranged to oppose with the rotary drum-side scale portion while being inclined at the angle of +θ from the center plane about the second center axis and that reads the scale.